For ultrafine particle removal in ultrapure water, chemicals, solvents, and other aqueous solutions.
ENM cartridge and capsule filters are made with Nylon 6,6 membrane. These long-proven filters are used for ultrafine particle removal in ultrapure water, chemicals, solvents and other aqueous solutions. Pore sizes range from 0.10 to 0.65 µm and the filter sizes scale from laboratory to full production using identical materials to ensure consistent results.
The ENM filters have high retention and throughput as well as broad chemical compatibility making them well-suited for the filtration of solvents and other harsh chemicals. They are used to as part of particle contamination control systems and remove ultrafine particles.
ENM filters are pulse power flushed until the rinse effluent reaches 18+ Megohm-cm and less than 3ppb TOC. Each filter is individually tested to ensure integrity.
Applications
- Ultrapure Water
- Chemicals
- Solvents
- Photoresists
- Developers
Features and Benefits
ENM is a family of Nylon 6,6 membrane fine particle removal filters.
- High retention and throughput
- Broad chemical compatibility
- Pulse power flushed until the rinse effluent reaches 18+ Megohm-cm and less than 3ppb TOC
- Pore sizes range from 0.10 to 0.65 µm
Filtration Area
View Data Sheet for further product information:
- Integrity test specifications
- Materials of construction
- Operating parameters
- Sanitization and sterilization
- Regulation & compliance
Quality Assurance
ENM filters are 100% integrity tested. CPF filters are developed and manufactured under an ISO 9001:2015 certified Quality Management System and designed to be used in cGMP-compliant processes.
ENM Cartridges
Available from 5-40 inches in length with several end connections and O-ring options.
ENM Capsules
These filters are ENM cartridges encapsulated in a polypropylene shell to minimize exposure to process fluids. Sizes range from 2-30 inches in length.
