Contamination control for gases can improve yields by removing particulates that cause defects in wafers or substrates. Gas distribution and point-of-use systems are all designed to maintain purity, but filtration is required to insure against system upsets. Using filter products made using polypropylene or PTFE membranes or stainless steel media can help assure your yields.
To estimate the number of filters you will need for your application, use our unique sizing tools.
Contact Critical Process Filtration to learn how we can evaluate your facility and recommend proper filtration.